Apparently, semiconductor companies worldwide are trying to opt for lithography technology for ultra-fine processes. While Taiwan’s TSMC has the maximum number of related patents. TSMC holds 448 patents, which is approx 170 more than its competitor tech giant Samsung.
As per TechInsights, the same is the semiconductor analysis agency, recent claims that TSMC has patents that substantially overtake Samsung Electronics in the next generation lithography technologies, including EUV.
It is to be worth informing here, that EUV has a wavelength that is about one-fourteenth shorter than the KrF (krypton fluoride) and ArF (argon fluoride) light sources. This is used in conventional exposure processes. Also, it allows the effective implementation of finer circuits. The same has largely got a place in advanced memory and system semiconductor-making processes.
Big companies that are involved comprise ASML, which is the world’s only EUV exposure equipment maker. On the other hand, ASM L’s major partners Carl Zeiss, and TSMC, the same involve in making semiconductors through EUV processes.
TSMC holds the maximum number of 279 patents and acquires first place. At the same time, EUV is in full-scale commercialization mode. While it also attracts huge attention from the semiconductor industry. Alternatively, some companies like NIL focus on alternate techs such as DSA. The reason is the higher price of the EUV exposure equipment.
For those who are not aware then DSA is a method of forming patterns with chemical materials. This is also advantageous for cost-cutting as compared to conventional exposure processes. Although both of these technologies do not meet reliability criteria like defect control, therefore they are still in the R&D stage.
“TSMC is the leading foundry in advanced lithography research and development, investing the most in EUV, but also paying a lot of attention to NIL and DSA,” TechInsights explained, “Samsung Electronics, which ranks fifth in total patent holdings, is also less than TSMC but is active in securing patents.”
In the interim, the major semiconductor companies in North America, including Intel, IBM, and GlobalFoundaries do not come under the top 10 ranking of patent holdings. While, in China, the Chinese Academy of Sciences is energetically investing in the development of EUV-related technologies.
